Three-dimensional transient electrothermal simulation of electrostatic discharge protection circuits

Three-dimensional transient electrothermal simulation of electrostatic discharge protection circuits

Transient electrothermal simulation of ESD protection circuits using the 3-D finite element device simulator will be shown to explain the electrothermal physics in ESD protection circuits in 0.5 and 0.25 μm channel length CMOS technologies. Simulation, ESD and failure analysis will be compared for e...

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Veröffentlicht in:Journal of electrostatics 1995, Vol.36 (1), p.55-80
Hauptverfasser: Voldman, Steven H., Furkay, Stephen S., Slinkman, James R.
Format: Artikel
Sprache:eng
Schlagworte:
3D simulations
Electro-thermal
ESD
Protection
Transient
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Zusammenfassung:Transient electrothermal simulation of ESD protection circuits using the 3-D finite element device simulator will be shown to explain the electrothermal physics in ESD protection circuits in 0.5 and 0.25 μm channel length CMOS technologies. Simulation, ESD and failure analysis will be compared for evaluation of correlation.
ISSN:0304-3886
1873-5738
DOI:10.1016/0304-3886(95)00024-5