Direct molecular-beam epitaxial growth of ZnTe(100) and CdZnTe(100)/ZnTe(100) on Si(100) substrates

Epitaxial structures of ZnTe(100) and CdZnTe(100)/ZnTe(100) have been deposited by molecular-beam epitaxy onto Si(100) substrates misoriented from 0° to 8° towards the [011] direction. The films were characterized with x-ray diffraction, photoluminescence spectroscopy, optical microscopy, and stylus...

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Veröffentlicht in:Applied physics letters 1993-08, Vol.63 (6), p.818-820
Hauptverfasser: DE LYON, T. J, ROTH, J. A, WU, O. K, JOHNSON, S. M, COCKRUM, C. A
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Sprache:eng
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Zusammenfassung:Epitaxial structures of ZnTe(100) and CdZnTe(100)/ZnTe(100) have been deposited by molecular-beam epitaxy onto Si(100) substrates misoriented from 0° to 8° towards the [011] direction. The films were characterized with x-ray diffraction, photoluminescence spectroscopy, optical microscopy, and stylus profilometry. Single-crystal CdZnTe(100) films comparable in structural quality to those obtained with growth on GaAs/Si composite substrates have been demonstrated on both 4° and 8° misoriented Si with the use of ZnTe buffer layers. X-ray rocking curves with FWHM less than 300 arcsec for ZnTe (400) and less than 160 arcsec for CdZnTe(400) have been obtained for as-grown films. Specular surface morphologies, superior to those obtained on GaAs/Si composite substrates, are also observed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.109918