High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2devices by control of oxygen-deficient layer

High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2devices by control of oxygen-deficient layer

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Veröffentlicht in:Nanotechnology 2022-02, Vol.33 (8)
Hauptverfasser: Yadav, Manoj, Kashir, Alireza, Oh, Seungyeol, Nikam, Revannath Dnyandeo, Kim, Hyungwoo, Jang, Hojung, Hwang, Hyunsang
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container_issue 8
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container_title Nanotechnology
container_volume 33
creator Yadav, Manoj
Kashir, Alireza
Oh, Seungyeol
Nikam, Revannath Dnyandeo
Kim, Hyungwoo
Jang, Hojung
Hwang, Hyunsang
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doi_str_mv 10.1088/1361-6528/ac3a38
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title High polarization and wake-up free ferroelectric characteristics in ultrathin Hf0.5Zr0.5O2devices by control of oxygen-deficient layer
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