Precision surface cleaning with supercritical carbon dioxide: Issues, experience, and prospects

Manufacturing industries have traditionally relied on chlorofluorocarbons (CFCs) and other halogenated solvents for precision cleaning of metals, plastics, composites, ceramics, electronic components, and other materials. The use of these solvents is being phased out because of their role in stratospheric ozone depletion, and a number of alternative cleaning technologies and solvents are in various stages of development and use. Supercritical carbon dioxide (CO sub 2 ) is a promising alternative because of its low cost, low toxicity, nonflammability, and environmental acceptability. This article presents recent experience working with CO sub 2 as a cleaning solvent to reduce the technology to commercial practice.