Use of ion implantation for improving the adhesion of diamond-like carbon films deposited by means of other techniques

Nanoindentation and friction tests have been used to establish the beneficial effect of pre-implantation of low C fluences upon the adhesion of diamond-like coatings synthesized by a laser plasma or by plasma enhanced chemical vapour deposition. The improvement is attributed to an interfacial layer...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1992-09, Vol.B80/81, p.1499-1501
Hauptverfasser: Pivin, J C, Lee, T J, You, J H, Park, H, Davanloo, F, Collins, C B, Catania, P, Sampeur, Y, Bernas, H
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Sprache:eng
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Zusammenfassung:Nanoindentation and friction tests have been used to establish the beneficial effect of pre-implantation of low C fluences upon the adhesion of diamond-like coatings synthesized by a laser plasma or by plasma enhanced chemical vapour deposition. The improvement is attributed to an interfacial layer of carbide. Substrate: Ti-6Al-4V.
ISSN:0168-583X