Physical vapor deposition techniques for the growth of YBa sub(2)Cu sub(3)O sub(7) thin films

Physical vapor deposition techniques for the growth of YBa sub(2)Cu sub(3)O sub(7) thin films

The growth and characterisation of YBa sub(2)Cu sub(3)O sub(7) thin films are reviewed. The discussion of growth is limited to the physical vapor deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growth epitaxial films in situ and ch...

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Veröffentlicht in:Superconductor science & technology 1990-01, Vol.3 (1), p.38-52
Hauptverfasser: Humphreys, R G, Satchell, J S, Chew, N G, Edwards, J A, Goodyear, S W, Blenkinsop, S E, Dosser, O D, Cullis, A G
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Sprache:eng
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Zusammenfassung:The growth and characterisation of YBa sub(2)Cu sub(3)O sub(7) thin films are reviewed. The discussion of growth is limited to the physical vapor deposition techniques of laser ablation, sputtering and evaporation. Emphasis is placed on the practical problems of growth epitaxial films in situ and characterising them.
ISSN:0953-2048