New nondestructive composition depth profiling method for diagnostics of multilayer quantum-well structures

A composition depth profiling method based on the measurement of the X-ray electron photoemission total yield is developed. When the X-ray photon energy exceeds the electron shell ionisation energies of the sample elements step-like increases of the total yield are observed. The magnitudes of the st...

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Veröffentlicht in:	Surface science 1990-04, Vol.228 (1), p.532-537
Hauptverfasser:	Konnikov, S.G., Pogrebitsky, K.Ju
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A composition depth profiling method based on the measurement of the X-ray electron photoemission total yield is developed. When the X-ray photon energy exceeds the electron shell ionisation energies of the sample elements step-like increases of the total yield are observed. The magnitudes of the steps are related to the atomic concentrations; depth profiling is provided by scanning the angle of incidence of the X-rays. Examples of application of the method are presented.
ISSN:	0039-6028 1879-2758
DOI:	10.1016/0039-6028(90)90370-N