Photonic topology optimization with semiconductor-foundry design-rule constraints

We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and si...

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Veröffentlicht in:Optics express 2021-07, Vol.29 (15), p.23916-23938
Hauptverfasser: Hammond, Alec M., Oskooi, Ardavan, Johnson, Steven G., Ralph, Stephen E.
Format: Artikel
Sprache:eng
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Zusammenfassung:We present a unified density-based topology-optimization framework that yields integrated photonic designs optimized for manufacturing constraints including all those of commercial semiconductor foundries. We introduce a new method to impose minimum-area and minimum-enclosed-area constraints, and simultaneously adapt previous techniques for minimum linewidth, linespacing, and curvature, all of which are implemented without any additional re-parameterizations. Furthermore, we show how differentiable morphological transforms can be used to produce devices that are robust to over/under-etching while also satisfying manufacturing constraints. We demonstrate our methodology by designing three broadband silicon-photonics devices for nine different foundry-constraint combinations. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.431188