In Situ Growth of Superconducting Bi--Sr--Ca--Cu--O Thin Films by a High Pressure Sputtering Process
High quality superconducting Bi--Sr--Ca--Cu--O thin films have successfully been prepared in situ on MgO(100) and SrTiO sub 3 (100) substrates using a high oxygen pressure (3-4 mbar) DC sputtering system. Bi sub 2 Sr sub 2 Ca sub 1 Cu sub 2 O sub x and Bi sub 1.7 Pb sub 0.3 Sr sub 2 Ca sub 2 Cu sub...
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Veröffentlicht in: | Surface science 1990-10, Vol.251-252, p.712-716 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | High quality superconducting Bi--Sr--Ca--Cu--O thin films have successfully been prepared in situ on MgO(100) and SrTiO sub 3 (100) substrates using a high oxygen pressure (3-4 mbar) DC sputtering system. Bi sub 2 Sr sub 2 Ca sub 1 Cu sub 2 O sub x and Bi sub 1.7 Pb sub 0.3 Sr sub 2 Ca sub 2 Cu sub 3.6 O sub x single targets were used. The as-sputtered films showed a high degree of c-axis orientation on MgO substrates and an epitaxial growth on SrTiO sub 3 substrates. Without any post-annealing treatment the main composition of the films corresponded to the 2212 phase with a T sub c onset of 85K. The films were characterized by X-ray diffraction, SEM, EDX, and RBS analysis. Graphs, Photomicrographs, Spectra, Diffraction patterns. 9 ref.--AA |
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ISSN: | 0039-6028 |