On-wafer microwave measurement setup for investigations on HEMT's and high Tc superconductors at cryogenic temperatures down to 20 K

On-wafer microwave measurement setup for investigations on HEMT's and high Tc superconductors at cryogenic temperatures down to 20 K

In this paper an on-wafer measurement setup for the microwave characterization of HEMT's and high Tc superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements, can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectivel...

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Veröffentlicht in:IEEE transactions on microwave theory and techniques 1992-12, Vol.40 (12), p.2325-2331
Hauptverfasser: MESCHEDE, H, REUTER, R, ALBERS, J, KRAUS, J, PETERS, D, BROCKERHOFF, W, TEGUDE, F.-J, BODE, M, SCHUBERT, J, ZANDER, W
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
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Zusammenfassung:In this paper an on-wafer measurement setup for the microwave characterization of HEMT's and high Tc superconductors at temperatures down to 20 K is presented. Both S-parameter and noise measurements, can be performed in the frequency range from 45 MHz to 40 GHz and 2 GHz to 18 GHz, respectively, using standard calibration techniques and commercial microwave probe tips. Microwave measurements on a pseudomorphic FET and an AlGaAs/GaAs HEMT as well as investigations on a superconducting filter are presented to demonstrate the efficiency of the developed system. (Author)
ISSN:0018-9480
1557-9670
DOI:10.1109/22.179897