Insufficiently developed collision cascades in sputtering and secondary ion emission

Insufficiently developed collision cascades in sputtering and secondary ion emission

Polar angle distributions of secondary ion emission under 5–6 keV Ar +-ion bombardment of amorphous Si, polycrystalline YBa 2Cu 3O 7 and single crystal Al(100) surfaces have been measured and compared with computer simulations by the TRIM.SP and MARLOWE codes. They are found to depend on energy and...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1992-10, Vol.72 (1), p.40-44
1. Verfasser: Kosyachkov, A.A.
Format: Artikel
Sprache:eng
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Zusammenfassung:Polar angle distributions of secondary ion emission under 5–6 keV Ar +-ion bombardment of amorphous Si, polycrystalline YBa 2Cu 3O 7 and single crystal Al(100) surfaces have been measured and compared with computer simulations by the TRIM.SP and MARLOWE codes. They are found to depend on energy and mass of the ejected particles. This is discussed with regard to insufficiently developed collision cascades affected by the surface composition and structure.
ISSN:0168-583X
1872-9584
DOI:10.1016/0168-583X(92)95278-Y