The influence of argon ion bombardment on form birefringence in thin films of titania

Thin films of titanium oxide deposited in the presence of oxygen at oblique incidence under argon ion bombardment exhibit birefringence that depends on the energy and relative direction of the ion beam and material flux.

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of applied physics 1992-04, Vol.71 (7), p.3201-3203
Hauptverfasser:	SPRAGUE, R. W, HICKEY, C. F, HODGKINSON, I. J
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics
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Beschreibung
Zusammenfassung:	Thin films of titanium oxide deposited in the presence of oxygen at oblique incidence under argon ion bombardment exhibit birefringence that depends on the energy and relative direction of the ion beam and material flux.
ISSN:	0021-8979 1089-7550
DOI:	10.1063/1.350964