Magnetic properties of Fe-Ta-N-O film with high saturation flux density

Magnetic properties of Fe-Ta-N-O film with high saturation flux density

The magnetic properties and the microstructure of Fe-Ta-N-O film prepared by the facing targets sputtering method are reported. The addition of a small amount of Ta to Fe-N-O shown to improve the thermal stability of the magnetic properties at 600 degrees C without a decrease in saturation flux dens...

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Veröffentlicht in:IEEE transactions on magnetics 1990-09, Vol.26 (5), p.1500-1502
Hauptverfasser: Watanabe, Y., Oura, H., Onozato, N.
Format: Artikel
Sprache:eng
Schlagworte:
Amorphous magnetic materials
Annealing
Applied sciences
Coercive force
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Magnetic films
Magnetic properties
Magnetic properties and materials
Metals. Metallurgy
Microstructure
Physics
Soft magnetic materials
Sputtering
Temperature
Thermal stability
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Zusammenfassung:The magnetic properties and the microstructure of Fe-Ta-N-O film prepared by the facing targets sputtering method are reported. The addition of a small amount of Ta to Fe-N-O shown to improve the thermal stability of the magnetic properties at 600 degrees C without a decrease in saturation flux density (B/sub s/=19 kG). The microcrystallized state of Fe-Ta-N-O film observed by X-ray diffractometry is related to the good soft magnetic properties.< >
ISSN:0018-9464
1941-0069
DOI:10.1109/20.104429