Microstructure of visibly luminescent porous silicon
The microstructure of luminescent porous silicon, formed by electrochemical etching of silicon wafers has been characterized by cross-sectional high-resolution transmission electron microscopy. Results of this study reveal the structure to consist of Si crystallites. The crystallites are ∼3.5 nm in...
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Veröffentlicht in: | Applied physics letters 1992-06, Vol.60 (22), p.2800-2802 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The microstructure of luminescent porous silicon, formed by electrochemical etching of silicon wafers has been characterized by cross-sectional high-resolution transmission electron microscopy. Results of this study reveal the structure to consist of Si crystallites. The crystallites are ∼3.5 nm in size and are randomly distributed throughout the porous Si region. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.106832 |