Microstructure of visibly luminescent porous silicon

The microstructure of luminescent porous silicon, formed by electrochemical etching of silicon wafers has been characterized by cross-sectional high-resolution transmission electron microscopy. Results of this study reveal the structure to consist of Si crystallites. The crystallites are ∼3.5 nm in...

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Veröffentlicht in:Applied physics letters 1992-06, Vol.60 (22), p.2800-2802
Hauptverfasser: COLE, M. W, HARVEY, J. F, LUX, R. A, ECKART, D. W, TSU, R
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Sprache:eng
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Zusammenfassung:The microstructure of luminescent porous silicon, formed by electrochemical etching of silicon wafers has been characterized by cross-sectional high-resolution transmission electron microscopy. Results of this study reveal the structure to consist of Si crystallites. The crystallites are ∼3.5 nm in size and are randomly distributed throughout the porous Si region.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.106832