Micro resonant force gauges

Micro resonant force gauges

A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensiti...

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Veröffentlicht in:Sensors and actuators. A, Physical Physical, 1992, Vol.30 (1), p.35-53
Hauptverfasser: Tilmans, Harrie A.C., Elwenspoek, Miko, Fluitman, Jan H.J.
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Sprache:eng
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Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Measurement and testing methods
Physics
Solid mechanics
Structural and continuum mechanics
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container_issue 1
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container_title Sensors and actuators. A, Physical
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creator Tilmans, Harrie A.C.
Elwenspoek, Miko
Fluitman, Jan H.J.
description A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.
doi_str_mv 10.1016/0924-4247(92)80194-8
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subjects Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Measurement and testing methods
Physics
Solid mechanics
Structural and continuum mechanics
title Micro resonant force gauges
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