Micro resonant force gauges

A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensiti...

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Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 1992, Vol.30 (1), p.35-53
Hauptverfasser:	Tilmans, Harrie A.C., Elwenspoek, Miko, Fluitman, Jan H.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Measurement and testing methods Physics Solid mechanics Structural and continuum mechanics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.
ISSN:	0924-4247 1873-3069
DOI:	10.1016/0924-4247(92)80194-8