Development of transparent and conductive ZnO films by spray pyrolysis

Indium-doped zinc oxide (IZO) films were deposited on Corning 7059 substrates by spray pyrolysis. To achieve higher electrical conductivity, both the zinc acetate concentration and indium concentration in the solution were varied. The films were characterised for their structural and electrical properties. The carrier concentration is dependent on Zn2+ and In3+ incorporation, whereas the mobility is directly related to the structural properties. Film stability in H2 plasma was also checked for possible use in amorphous and microcrystalline silicon related fields. It was found that the films can be sustained in H2 plasma. IZO films of high conductivity can, therefore, be used for the development of amorphous and microcrystalline silicon solar cells. 15 refs.