Dip-coating of Sb-doped SnO2 films by ethanolamine-alkoxide method

Transparent, highly conducting thin Sb-doped SnO2 films were deposited on glass by a dip-coating method using a solution of tin tetraisopropoxide-triethanolamine-H2O-isopropanol. The viscosity of the solution obtained from this system remained constant over 700 h. The resistivity of the film depended slightly on film thickenss: it was 0.025 ohm.cm below 100 nm and decreased to a constant value of 0.005 ohm.cm above 200 nm. Average transmittance of visible light was higher than 95% for undoped films and higher than 80% for Sb-doped films. The coated thin films were very uniform and dense, whereas an OMCVD process formed porous films with an island texture. The advantages and disadvantages of the dip-coating process are discussed in comparison with the OMCVD process. 41 refs.