Efficient pulsed microwave excitation of a high-pressure excimer discharge

Efficient pulsed microwave excitation of a high-pressure excimer discharge

We report on a microstrip line structure able to sustain plasmas up to five bars of a He/Xe/HCl mixture, with good stability and reproducibility and without preionization of the mixture. The microwave power coupling has been characterized and the incoherent ultraviolet-308 nm emission has been studi...

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Veröffentlicht in:Journal of applied physics 1992-06, Vol.71 (11), p.5712-5714
Hauptverfasser: ROSSEAU, V, PASQUIERS, S, BOISSE-LAPORTE, C, CALLEDE, G, LEPRINCE, P, MAREC, J, PUECH, V
Format: Artikel
Sprache:eng
Schlagworte:
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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Zusammenfassung:We report on a microstrip line structure able to sustain plasmas up to five bars of a He/Xe/HCl mixture, with good stability and reproducibility and without preionization of the mixture. The microwave power coupling has been characterized and the incoherent ultraviolet-308 nm emission has been studied by means of time-resolved spectroscopy.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.350507