Dynamic Monte-Carlo simulation of compositional change and atomic redistribution in multicomponent targets under ion bombardment
A dynamic Monte Carlo program developed for the simulation of high-fluence effects in ion bombardment of multicomponent targets is described. The program includes a code for modelling the chemically guided motion of the slowed down primaries and recoils. Examples of the application of the simulation...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1992-06, Vol.69 (2), p.193-199 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A dynamic Monte Carlo program developed for the simulation of high-fluence effects in ion bombardment of multicomponent targets is described. The program includes a code for modelling the chemically guided motion of the slowed down primaries and recoils. Examples of the application of the simulation program to Ar
+ sputtering of CdHgTe and SiO
2, O
+ implantation into Si and Ar
+ sputtering of Al/Si with concurrent adsorption of O
2 are presented and compared with experimental results. |
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| ISSN: | 0168-583X 1872-9584 |
| DOI: | 10.1016/0168-583X(92)96010-V |