Deposition of copper oxide thin films on different substrates by pulsed excimer laser ablation

Stoichiometric films of cupric and cuprous oxide are deposited on Si, MgO, and Y-ZrO2 substrates by pulsed excimer laser ablation technique. It is found that the equilibrium phase diagram based considerations dictate the phase formation. The films are characterized by small-angle x-ray diffraction,...

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Veröffentlicht in:	Journal of applied physics 1992-10, Vol.72 (8), p.3765-3769
Hauptverfasser:	OGALE, S. B, BILURKAR, P. G, MATE, N, KANETKAR, S. M, NALIN PARIKH, BIJOY PATNAIK
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
Online-Zugang:	Volltext
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