Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure
Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both...
Gespeichert in:
| Veröffentlicht in: | Materials letters 1989, Vol.8 (10), p.436-440 |
|---|---|
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 440 |
|---|---|
| container_issue | 10 |
| container_start_page | 436 |
| container_title | Materials letters |
| container_volume | 8 |
| creator | Dousselin, G. Guilloux-Viry, M. Pinel, J. Lossouarn, F. Kervadec, D. Perrin, A. |
| description | Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both films and on bilayers. The critical temperatures were measured from the resistive transitions. The adjacent 2-1-1 layer texture appears to induce granular behaviour in the 1-2-3 film. |
| doi_str_mv | 10.1016/0167-577X(89)90068-2 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_25471261</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>0167577X89900682</els_id><sourcerecordid>25463183</sourcerecordid><originalsourceid>FETCH-LOGICAL-c281t-39cf4c4fdac76a2f0846b85b0852fcc8cd05deeeba89bb05aed5b8bbe6ed1ced3</originalsourceid><addsrcrecordid>eNqNkUtLAzEUhYMoWKv_wMWsRMHYJPPKbAQtvqDQhQq6CsnNHRtpZ6bJjFB_vTNWXIqLy92c8537IOSYswvOeDbpK6dpnr-cyuKsYCyTVOyQEZd5TJMiL3bJ6FeyTw5CeGeMJQVLRmT92HRtiz6y2NTBta6uorqMQtegh7qyHbSueos4FTSeCMopj16v9bSbR8Yt9QZ9OI9gob2GHuI-9TdAVzbCFha00QO7GgiNrwFt5_GQ7JV6GfDop4_J8-3N0_SezuZ3D9OrGQUheUvjAsoEktJqyDMtSiaTzMjUMJmKEkCCZalFRKNlYQxLNdrUSGMwQ8v7pHhMTrbcPnndYWjVygXA5VJXWHdBiTTJucj4f4RZzGXcC5OtEHwdgsdSNd6ttN8oztTwCDVcWQ1XVrJQ349Qorddbm3Yb_vh0KsADqt-RucRWmVr9zfgC6RTkmM</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>25463183</pqid></control><display><type>article</type><title>Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure</title><source>Elsevier ScienceDirect Journals Complete</source><creator>Dousselin, G. ; Guilloux-Viry, M. ; Pinel, J. ; Lossouarn, F. ; Kervadec, D. ; Perrin, A.</creator><creatorcontrib>Dousselin, G. ; Guilloux-Viry, M. ; Pinel, J. ; Lossouarn, F. ; Kervadec, D. ; Perrin, A.</creatorcontrib><description>Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both films and on bilayers. The critical temperatures were measured from the resistive transitions. The adjacent 2-1-1 layer texture appears to induce granular behaviour in the 1-2-3 film.</description><identifier>ISSN: 0167-577X</identifier><identifier>EISSN: 1873-4979</identifier><identifier>DOI: 10.1016/0167-577X(89)90068-2</identifier><language>eng</language><publisher>Elsevier B.V</publisher><ispartof>Materials letters, 1989, Vol.8 (10), p.436-440</ispartof><rights>1989</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c281t-39cf4c4fdac76a2f0846b85b0852fcc8cd05deeeba89bb05aed5b8bbe6ed1ced3</citedby><cites>FETCH-LOGICAL-c281t-39cf4c4fdac76a2f0846b85b0852fcc8cd05deeeba89bb05aed5b8bbe6ed1ced3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/0167577X89900682$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,4010,27900,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Dousselin, G.</creatorcontrib><creatorcontrib>Guilloux-Viry, M.</creatorcontrib><creatorcontrib>Pinel, J.</creatorcontrib><creatorcontrib>Lossouarn, F.</creatorcontrib><creatorcontrib>Kervadec, D.</creatorcontrib><creatorcontrib>Perrin, A.</creatorcontrib><title>Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure</title><title>Materials letters</title><description>Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both films and on bilayers. The critical temperatures were measured from the resistive transitions. The adjacent 2-1-1 layer texture appears to induce granular behaviour in the 1-2-3 film.</description><issn>0167-577X</issn><issn>1873-4979</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1989</creationdate><recordtype>article</recordtype><recordid>eNqNkUtLAzEUhYMoWKv_wMWsRMHYJPPKbAQtvqDQhQq6CsnNHRtpZ6bJjFB_vTNWXIqLy92c8537IOSYswvOeDbpK6dpnr-cyuKsYCyTVOyQEZd5TJMiL3bJ6FeyTw5CeGeMJQVLRmT92HRtiz6y2NTBta6uorqMQtegh7qyHbSueos4FTSeCMopj16v9bSbR8Yt9QZ9OI9gob2GHuI-9TdAVzbCFha00QO7GgiNrwFt5_GQ7JV6GfDop4_J8-3N0_SezuZ3D9OrGQUheUvjAsoEktJqyDMtSiaTzMjUMJmKEkCCZalFRKNlYQxLNdrUSGMwQ8v7pHhMTrbcPnndYWjVygXA5VJXWHdBiTTJucj4f4RZzGXcC5OtEHwdgsdSNd6ttN8oztTwCDVcWQ1XVrJQ349Qorddbm3Yb_vh0KsADqt-RucRWmVr9zfgC6RTkmM</recordid><startdate>1989</startdate><enddate>1989</enddate><creator>Dousselin, G.</creator><creator>Guilloux-Viry, M.</creator><creator>Pinel, J.</creator><creator>Lossouarn, F.</creator><creator>Kervadec, D.</creator><creator>Perrin, A.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>8FD</scope><scope>JG9</scope><scope>7SR</scope></search><sort><creationdate>1989</creationdate><title>Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure</title><author>Dousselin, G. ; Guilloux-Viry, M. ; Pinel, J. ; Lossouarn, F. ; Kervadec, D. ; Perrin, A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c281t-39cf4c4fdac76a2f0846b85b0852fcc8cd05deeeba89bb05aed5b8bbe6ed1ced3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1989</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dousselin, G.</creatorcontrib><creatorcontrib>Guilloux-Viry, M.</creatorcontrib><creatorcontrib>Pinel, J.</creatorcontrib><creatorcontrib>Lossouarn, F.</creatorcontrib><creatorcontrib>Kervadec, D.</creatorcontrib><creatorcontrib>Perrin, A.</creatorcontrib><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Engineered Materials Abstracts</collection><jtitle>Materials letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dousselin, G.</au><au>Guilloux-Viry, M.</au><au>Pinel, J.</au><au>Lossouarn, F.</au><au>Kervadec, D.</au><au>Perrin, A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure</atitle><jtitle>Materials letters</jtitle><date>1989</date><risdate>1989</risdate><volume>8</volume><issue>10</issue><spage>436</spage><epage>440</epage><pages>436-440</pages><issn>0167-577X</issn><eissn>1873-4979</eissn><abstract>Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both films and on bilayers. The critical temperatures were measured from the resistive transitions. The adjacent 2-1-1 layer texture appears to induce granular behaviour in the 1-2-3 film.</abstract><pub>Elsevier B.V</pub><doi>10.1016/0167-577X(89)90068-2</doi><tpages>5</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0167-577X |
| ispartof | Materials letters, 1989, Vol.8 (10), p.436-440 |
| issn | 0167-577X 1873-4979 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_25471261 |
| source | Elsevier ScienceDirect Journals Complete |
| title | Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T16%3A14%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Sputter%20deposition%20of%20superconducting%201-2-3/2-1-1%20YBaCuO%20bilayers,%20characterization%20and%20etch-patterning%20procedure&rft.jtitle=Materials%20letters&rft.au=Dousselin,%20G.&rft.date=1989&rft.volume=8&rft.issue=10&rft.spage=436&rft.epage=440&rft.pages=436-440&rft.issn=0167-577X&rft.eissn=1873-4979&rft_id=info:doi/10.1016/0167-577X(89)90068-2&rft_dat=%3Cproquest_cross%3E25463183%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=25463183&rft_id=info:pmid/&rft_els_id=0167577X89900682&rfr_iscdi=true |