Sputter deposition of superconducting 1-2-3/2-1-1 YBaCuO bilayers, characterization and etch-patterning procedure

Superconducting 1-2-3/2-1-1 YBaCuO bilayer structures on sapphire substrates have been fabricated by rf magnetron sputtering in a two-step process. They have been characterized by XRD, EDS and resistivity measurements. Chemical and ion milling etch-patterning procedures have been carried out on both films and on bilayers. The critical temperatures were measured from the resistive transitions. The adjacent 2-1-1 layer texture appears to induce granular behaviour in the 1-2-3 film.