Soft Magnetic Properties and Magnetic Anisotropy Dispersions of Fe–Ni/Ni–Fe Multilayered Films

Fe–2 at.%Ni/Ni–20 at.%Fe multilayered films are formed by the ion beam sputtering method. Their magnetic properties and magnetic anisotropy dispersions are examined. The Fe–Ni/Ni–Fe multilayered film of a 25 nm period displays a relative permeability of 1300 and a saturation magnetic flux density of 1.9 T. As the period of Fe–Ni/Ni–Fe multilayered films is reduced, the Fe–Ni crystallite size and the magnetic anisotropy dispersion become smaller, resulting in good soft magnetic properties.