Spectroscopic ellipsometry studies of SIMOX structures and correlation with cross-section TEM

The results are presented of a spectroscopic ellipsometry (SE) study of separation by implanted oxygen (SIMOX) structures both as-implanted and annealed at different temperatures. The obtained results are compared with transmission electron microscopy (TEM) observations of the same structures. It is shown that both techniques give comparable results but that SE allows additional information to be obtained. The strength of SE is not only to measure the layer thickness of multilayer structures nondestructively, but also to obtain quantitative information on the composition and crystal quality of the layers. Some limitations of the SE technique are also indicated.