Quality of microstructures produced by laser lithography and system performance

Quality of microstructures produced by laser lithography and system performance

The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Microelectronic engineering 1989, Vol.9 (1), p.69-72
Hauptverfasser: Ulrich, H., Wijnaendts-van-Resandt, R.W., Koop, N., Schickfuss, M.v., Rensch, C., Ehrensperger, W.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 72
container_issue 1
container_start_page 69
container_title Microelectronic engineering
container_volume 9
creator Ulrich, H.
Wijnaendts-van-Resandt, R.W.
Koop, N.
Schickfuss, M.v.
Rensch, C.
Ehrensperger, W.
description The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system are in the field of generation of masks and reticles, structurization of gate arrays and the direct writing of application-specific integrated circuits (ASICs).
doi_str_mv 10.1016/0167-9317(89)90015-4
format Article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_25410349</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>0167931789900154</els_id><sourcerecordid>25410349</sourcerecordid><originalsourceid>FETCH-LOGICAL-c199t-40cd4bbdcdc0f58195a05a0aeabfc07e673245a7307a30dd0e0315cb86de4bd23</originalsourceid><addsrcrecordid>eNp9kE9LxDAQxYMouK5-Aw85iR6qk03SNhdBFv_BwiLoOaTJ1I202zVphX57U1c8CjPM5fce8x4h5wyuGbD8Jm2RKc6Ky1JdKQAmM3FAZqwseCZlXh6S2R9yTE5i_EhMLqCckfXLYBrfj7Sraett6GIfBtsPASPdhc4NFh2tRtqYiIEmctO9B7PbjNRsHY1j7LGlOwx1F1qztXhKjmrTRDz7vXPy9nD_unzKVuvH5-XdKrNMqT4TYJ2oKmedhVqWTEkDaQyaqrZQYF7whZCm4FAYDs4BAmfSVmXuUFRuwefkYu-bnvwcMPa69dFi05gtdkPUCykYcKESKPbglC0GrPUu-NaEUTPQU3t6qkZP1ehS6Z_2tEiy270MU4gvj0FH6zEFdD6g7bXr_P8G34b2eJI</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>25410349</pqid></control><display><type>article</type><title>Quality of microstructures produced by laser lithography and system performance</title><source>Elsevier ScienceDirect Journals Complete</source><creator>Ulrich, H. ; Wijnaendts-van-Resandt, R.W. ; Koop, N. ; Schickfuss, M.v. ; Rensch, C. ; Ehrensperger, W.</creator><creatorcontrib>Ulrich, H. ; Wijnaendts-van-Resandt, R.W. ; Koop, N. ; Schickfuss, M.v. ; Rensch, C. ; Ehrensperger, W.</creatorcontrib><description>The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system are in the field of generation of masks and reticles, structurization of gate arrays and the direct writing of application-specific integrated circuits (ASICs).</description><identifier>ISSN: 0167-9317</identifier><identifier>EISSN: 1873-5568</identifier><identifier>DOI: 10.1016/0167-9317(89)90015-4</identifier><language>eng</language><publisher>Elsevier B.V</publisher><ispartof>Microelectronic engineering, 1989, Vol.9 (1), p.69-72</ispartof><rights>1989</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c199t-40cd4bbdcdc0f58195a05a0aeabfc07e673245a7307a30dd0e0315cb86de4bd23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/0167-9317(89)90015-4$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,4024,27923,27924,27925,45995</link.rule.ids></links><search><creatorcontrib>Ulrich, H.</creatorcontrib><creatorcontrib>Wijnaendts-van-Resandt, R.W.</creatorcontrib><creatorcontrib>Koop, N.</creatorcontrib><creatorcontrib>Schickfuss, M.v.</creatorcontrib><creatorcontrib>Rensch, C.</creatorcontrib><creatorcontrib>Ehrensperger, W.</creatorcontrib><title>Quality of microstructures produced by laser lithography and system performance</title><title>Microelectronic engineering</title><description>The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system are in the field of generation of masks and reticles, structurization of gate arrays and the direct writing of application-specific integrated circuits (ASICs).</description><issn>0167-9317</issn><issn>1873-5568</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1989</creationdate><recordtype>article</recordtype><recordid>eNp9kE9LxDAQxYMouK5-Aw85iR6qk03SNhdBFv_BwiLoOaTJ1I202zVphX57U1c8CjPM5fce8x4h5wyuGbD8Jm2RKc6Ky1JdKQAmM3FAZqwseCZlXh6S2R9yTE5i_EhMLqCckfXLYBrfj7Sraett6GIfBtsPASPdhc4NFh2tRtqYiIEmctO9B7PbjNRsHY1j7LGlOwx1F1qztXhKjmrTRDz7vXPy9nD_unzKVuvH5-XdKrNMqT4TYJ2oKmedhVqWTEkDaQyaqrZQYF7whZCm4FAYDs4BAmfSVmXuUFRuwefkYu-bnvwcMPa69dFi05gtdkPUCykYcKESKPbglC0GrPUu-NaEUTPQU3t6qkZP1ehS6Z_2tEiy270MU4gvj0FH6zEFdD6g7bXr_P8G34b2eJI</recordid><startdate>1989</startdate><enddate>1989</enddate><creator>Ulrich, H.</creator><creator>Wijnaendts-van-Resandt, R.W.</creator><creator>Koop, N.</creator><creator>Schickfuss, M.v.</creator><creator>Rensch, C.</creator><creator>Ehrensperger, W.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>1989</creationdate><title>Quality of microstructures produced by laser lithography and system performance</title><author>Ulrich, H. ; Wijnaendts-van-Resandt, R.W. ; Koop, N. ; Schickfuss, M.v. ; Rensch, C. ; Ehrensperger, W.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c199t-40cd4bbdcdc0f58195a05a0aeabfc07e673245a7307a30dd0e0315cb86de4bd23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1989</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ulrich, H.</creatorcontrib><creatorcontrib>Wijnaendts-van-Resandt, R.W.</creatorcontrib><creatorcontrib>Koop, N.</creatorcontrib><creatorcontrib>Schickfuss, M.v.</creatorcontrib><creatorcontrib>Rensch, C.</creatorcontrib><creatorcontrib>Ehrensperger, W.</creatorcontrib><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronic engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ulrich, H.</au><au>Wijnaendts-van-Resandt, R.W.</au><au>Koop, N.</au><au>Schickfuss, M.v.</au><au>Rensch, C.</au><au>Ehrensperger, W.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Quality of microstructures produced by laser lithography and system performance</atitle><jtitle>Microelectronic engineering</jtitle><date>1989</date><risdate>1989</risdate><volume>9</volume><issue>1</issue><spage>69</spage><epage>72</epage><pages>69-72</pages><issn>0167-9317</issn><eissn>1873-5568</eissn><abstract>The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system are in the field of generation of masks and reticles, structurization of gate arrays and the direct writing of application-specific integrated circuits (ASICs).</abstract><pub>Elsevier B.V</pub><doi>10.1016/0167-9317(89)90015-4</doi><tpages>4</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0167-9317
ispartof Microelectronic engineering, 1989, Vol.9 (1), p.69-72
issn 0167-9317
1873-5568
language eng
recordid cdi_proquest_miscellaneous_25410349
source Elsevier ScienceDirect Journals Complete
title Quality of microstructures produced by laser lithography and system performance
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T19%3A12%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Quality%20of%20microstructures%20produced%20by%20laser%20lithography%20and%20system%20performance&rft.jtitle=Microelectronic%20engineering&rft.au=Ulrich,%20H.&rft.date=1989&rft.volume=9&rft.issue=1&rft.spage=69&rft.epage=72&rft.pages=69-72&rft.issn=0167-9317&rft.eissn=1873-5568&rft_id=info:doi/10.1016/0167-9317(89)90015-4&rft_dat=%3Cproquest_cross%3E25410349%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=25410349&rft_id=info:pmid/&rft_els_id=0167931789900154&rfr_iscdi=true