Quality of microstructures produced by laser lithography and system performance

The prototype design, progress of realisation and the first results of a laser scanning micro structure writer are discussed. The system is based on a Helium Cadmium laser, high speed polygon scanning, precision positioning and modern data processing equipment. Possible applications of such a system are in the field of generation of masks and reticles, structurization of gate arrays and the direct writing of application-specific integrated circuits (ASICs).