Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation

Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation

Multilayers of ω-nonadecenyl trichlorosilane (V-NTS) have been prepared on SiO 2 /Al/Si substrates by repeated cycles of chemical adsorption (CA) of V-NTS in solution and activation of terminal double bond by electron beam (EB) irradiation. The terminal double bond facing the outside of a V-NTS mono...

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Veröffentlicht in:Japanese Journal of Applied Physics 1989-10, Vol.28 (10), p.L1854-L1856
Hauptverfasser: Ogawa, K, Mino, N, Tamura, H, Hatada, M
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container_end_page L1856
container_issue 10
container_start_page L1854
container_title Japanese Journal of Applied Physics
container_volume 28
creator Ogawa, K
Mino, N
Tamura, H
Hatada, M
description Multilayers of ω-nonadecenyl trichlorosilane (V-NTS) have been prepared on SiO 2 /Al/Si substrates by repeated cycles of chemical adsorption (CA) of V-NTS in solution and activation of terminal double bond by electron beam (EB) irradiation. The terminal double bond facing the outside of a V-NTS monolayer on the substrate reacted to form imino and/or amino groups when the irradiations were carried out in nitrogen atmosphere. This method provides a simple and rapid method of preparing multilayers with fewer defects on a large scale, which is important to the construction of the three-dimensional molecular structure.
doi_str_mv 10.1143/jjap.28.l1854
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The terminal double bond facing the outside of a V-NTS monolayer on the substrate reacted to form imino and/or amino groups when the irradiations were carried out in nitrogen atmosphere. 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title Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation
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