Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation

Multilayers of ω-nonadecenyl trichlorosilane (V-NTS) have been prepared on SiO 2 /Al/Si substrates by repeated cycles of chemical adsorption (CA) of V-NTS in solution and activation of terminal double bond by electron beam (EB) irradiation. The terminal double bond facing the outside of a V-NTS monolayer on the substrate reacted to form imino and/or amino groups when the irradiations were carried out in nitrogen atmosphere. This method provides a simple and rapid method of preparing multilayers with fewer defects on a large scale, which is important to the construction of the three-dimensional molecular structure.