Improvement in Soft Magnetism of Sendust Sputtered Films for High Performance MIG Head
Sendust thin films with relative permeability mu sub r up to 6000 were prepared by using the facing targets sputtering (FTS) system which is one of the plasma-free sputtering methods. The optimum values of the Ar gas pressure P sub Ar , the substrate temperature T sub S and the bias voltage to the s...
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| Veröffentlicht in: | Journal of magnetism and magnetic materials 1991-09, Vol.112 (1-3), p.432-434 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Sendust thin films with relative permeability mu sub r up to 6000 were prepared by using the facing targets sputtering (FTS) system which is one of the plasma-free sputtering methods. The optimum values of the Ar gas pressure P sub Ar , the substrate temperature T sub S and the bias voltage to the substrate V sub b were found. |
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| ISSN: | 0304-8853 |