Modification of Physico-Mechanical Properties of Metals and Metallic Coatings by Ion Implantation
The experimental results are reviewed on ion-induced physico-mechanical property modification (microhardness, wear resistance, friction) of metal and metallic coatings as a function of bombarding parameters such as energies in the range to 150 keV, implantation doses 10 exp 15 -10 exp 18 cm exp --2...
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Veröffentlicht in: | Vacuum 1989-09, Vol.42 (1-2), p.163-168 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The experimental results are reviewed on ion-induced physico-mechanical property modification (microhardness, wear resistance, friction) of metal and metallic coatings as a function of bombarding parameters such as energies in the range to 150 keV, implantation doses 10 exp 15 -10 exp 18 cm exp --2 , and ion species: chemically active gases (nitrogen), noble gases (Ar), their mixtures (Ar/N, N/hydrogen), and solid ions of B exp + , C exp + , Cu exp + , W exp + , etc. The materials under study were transition- or structural-metals such as Ti and its alloys, Ta, Ni, Mo, Al, steel, etc., and metallic films of Al, Mo, Ta, Cr, etc., which had been deposited on substrates of glass, Si and such others to a depth between 20-30 and 150-300 nm. The results on the microhardness--depth profiles for ion-implanted samples and the experimental test of the proposed two-layer N-assisted microhardness model have been reported. Optimum implantation parameters and possible mechanisms for modified tribological properties of metals are discussed. Photomicrographs, Graphs. 23 ref.--AA |
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ISSN: | 0042-207X |