Improved Control of Titanium Nitride Coating Properties Using Cathodic Arc Evaporation With a Pulsed Bias

Improved Control of Titanium Nitride Coating Properties Using Cathodic Arc Evaporation With a Pulsed Bias

A combined dc--pulse bias voltage was used in combination with a cathodic

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Veröffentlicht in:Surface & coatings technology 1991-04, Vol.49 (1-3), p.258-262
Hauptverfasser: Olbrich, W, Fessmann, J, Kampschulte, G, Ebberink, J
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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Zusammenfassung:A combined dc--pulse bias voltage was used in combination with a cathodic
ISSN:0257-8972