Length distribution of aluminum etch tunnels

A model was derived for the length distribution of aluminum etch tunnels, based on an assumed constant death rate per unit length. Both active and dead tunnels were accounted. The model gives reasonable fits to measured tunnel length distribution data with two adjustable parameters, the death rate per unit length and the number of active tunnels. The death rate parameter has a value of about 2% of tunnels dying per mu m of growth length for the set of experimental data. The numbers of active and dead tunnels appear to be consistent with other tunnel measurements.