Microstructural Evolution and Texture Development in Thin Films

Microstructural Evolution and Texture Development in Thin Films

The microstructure and texture of thin metal (Ni and tungsten) films deposited by ion assisted techniques at a few hundred eV have been characterized by X-ray diffraction and TEM. Microstructural changes were found to be associated with changes in deposition condition and deposited material.

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Veröffentlicht in:Materials science forum 1991-06, Vol.94-96 (1), p.537-542
Hauptverfasser: Trogolo, J A, Roy, R A, Cuomo, J J, Rajan, K
Format: Artikel
Sprache:eng
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Zusammenfassung:The microstructure and texture of thin metal (Ni and tungsten) films deposited by ion assisted techniques at a few hundred eV have been characterized by X-ray diffraction and TEM. Microstructural changes were found to be associated with changes in deposition condition and deposited material.
ISSN:0255-5476