Large-area mosaic diamond films approaching single-crystal quality
The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals in the structures, and chemical vapor deposit...
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Veröffentlicht in: | Applied physics letters 1991-06, Vol.58 (22), p.2485-2487 |
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container_title | Applied physics letters |
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creator | GEIS, M. W SMITH, H. I ARGOITIA, A ANGUS, J MA, G.-H. M GLASS, J. T BUTLER, J ROBINSON, C. J PRYOR, R |
description | The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals in the structures, and chemical vapor deposition overgrowth of the diamond seeds to form a continuous film. The film comprises ∼100 μm single crystals, which are separated by low-angle grain boundaries of a few degrees or less. We believe that these low-angle grain boundaries will not affect the electrical properties of majority-carrier devices. |
doi_str_mv | 10.1063/1.104851 |
format | Article |
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We believe that these low-angle grain boundaries will not affect the electrical properties of majority-carrier devices.</description><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Methods of crystal growth; physics of crystal growth</subject><subject>Physics</subject><subject>Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNo9kE1Lw0AYhBdRsFbBn5CDiJfovvuVzVGLX1Dwoufw7ttNXdkk7W566L830uJlhoGHYRjGroHfAzfyASZTVsMJmwGvqlIC2FM245zL0tQaztlFzj9T1ELKGXtaYlr7EpPHohsyBipWAbuhXxVtiF0ucLNJA9J36NdFniT6ktI-jxiL7Q5jGPeX7KzFmP3V0efs6-X5c_FWLj9e3xePy5KkhrF0xlhtuXKOe0SvRGVFTdYASKuk8CRrEEYROZJksW4dVLXWjrxwVWtAztntoXcatN35PDZdyORjxN4Pu9wILXSlpJrAuwNIacg5-bbZpNBh2jfAm7-TGmgOJ03ozbETM2FsE_YU8j-v6lpXUstfBxFlNQ</recordid><startdate>19910603</startdate><enddate>19910603</enddate><creator>GEIS, M. 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T</creatorcontrib><creatorcontrib>BUTLER, J</creatorcontrib><creatorcontrib>ROBINSON, C. J</creatorcontrib><creatorcontrib>PRYOR, R</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>GEIS, M. W</au><au>SMITH, H. I</au><au>ARGOITIA, A</au><au>ANGUS, J</au><au>MA, G.-H. M</au><au>GLASS, J. T</au><au>BUTLER, J</au><au>ROBINSON, C. J</au><au>PRYOR, R</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Large-area mosaic diamond films approaching single-crystal quality</atitle><jtitle>Applied physics letters</jtitle><date>1991-06-03</date><risdate>1991</risdate><volume>58</volume><issue>22</issue><spage>2485</spage><epage>2487</epage><pages>2485-2487</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>The seeding for large-area mosaic diamond films approaching single-crystal quality is described. The technique includes patterned etching of relief structures in Si substrates, deposition from a slurry and orientation of macroscopic diamond seed crystals in the structures, and chemical vapor deposition overgrowth of the diamond seeds to form a continuous film. The film comprises ∼100 μm single crystals, which are separated by low-angle grain boundaries of a few degrees or less. 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subjects | Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of crystal growth physics of crystal growth Physics Theory and models of crystal growth physics of crystal growth, crystal morphology and orientation |
title | Large-area mosaic diamond films approaching single-crystal quality |
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