Grain size dependence of 1/f noise in Al-Cu thin-film interconnections

1/f noise measurements have been performed on Al-Cu thin films, of varying grain size, which were also subjected to electromigration lifetime tests. The results indicate a strong grain size dependence of the 1/f noise magnitude in the films. Moreover there is a correlation between electromigration l...

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Veröffentlicht in:	Journal of applied physics 1991-08, Vol.70 (3), p.1561-1564
Hauptverfasser:	SCHWARZ, J. A, PATRINOS, A. J, BAKSHEE, I. S, SALKOV, E. A, KHIZHNYAK, B. I
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Metals. Metallurgy Physics
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