Forward-bias conduction of Schottky diodes on polysilicon thin films

An analysis of forward I-V characteristics for Al Schottky contacts to polycrystalline thin films is presented. Experimental results for lateral structures with various n/sup -/ doping levels show the expected twofold exponential characteristics representing a transition from electrode-limited to bu...

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Veröffentlicht in:IEEE transactions on electron devices 1989-07, Vol.36 (7), p.1311-1317
Hauptverfasser: Verghese, S., Hauser, J.R., Wortman, J.J., Kerns, S.E.
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container_issue 7
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container_title IEEE transactions on electron devices
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creator Verghese, S.
Hauser, J.R.
Wortman, J.J.
Kerns, S.E.
description An analysis of forward I-V characteristics for Al Schottky contacts to polycrystalline thin films is presented. Experimental results for lateral structures with various n/sup -/ doping levels show the expected twofold exponential characteristics representing a transition from electrode-limited to bulk-limited conduction. At higher doping levels the bulk-limited characteristic is not a perfect exponential. The thermionic emission theory has been modified to include crystallite resistivity between grain boundaries and successfully matches experimental data.< >
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subjects Applied sciences
Conductivity
Crystallization
Diodes
Doping
Electronics
Exact sciences and technology
Grain boundaries
Schottky barriers
Schottky diodes
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Testing
Thermionic emission
Transistors
Voltage
title Forward-bias conduction of Schottky diodes on polysilicon thin films
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