Diagnostics of low-frequency CH4 and H2 discharge by optical emission spectroscopy

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 1989-09, Vol.22 (9), p.1281-1287
Hauptverfasser: Kokubo, T, Tochikubo, F, Makabe, T
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container_title Journal of physics. D, Applied physics
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creator Kokubo, T
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Makabe, T
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doi_str_mv 10.1088/0022-3727/22/9/007
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ispartof Journal of physics. D, Applied physics, 1989-09, Vol.22 (9), p.1281-1287
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language eng
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
title Diagnostics of low-frequency CH4 and H2 discharge by optical emission spectroscopy
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