Characterization of Platinum--Carbon, Tungsten--Silicon, and Tungsten--B sub 4 C Multilayers

Multilayers of Pt/C, W/Si, and W/B sub 4 C have been developed as a reflector and dispersive element to be applied to the beamline optical system of the synchrotron radiation (SR) in 1-20 A region. Pt/C(2d = 105 A, N = 10) overcoated with Pt(d = 100 A) is useful in a glazing incidence optics, which makes it possible to extend the wavelength region to the shorter side at the fixed incidence angle. W/Si(2d = 53 A, N = 200) and W/B sub 4 C(2d = 31 A, N = 300) are utilized as a dispersive element of double-crystal monochromator (DXM). The second order of Bragg reflection of W/Si is matched to the first order of KAP(2d = 26.6 A) crystal. The characterization of these multilayers was carried out by using characteristic X-rays and monochromatized SR in 1.5-8 keV. DXM was made of a combination of W/Si and KAP and a pair of W/B sub 4 C. Multilayers are used as the first crystal to protect the damage of the crystal caused by the strong irradiation of SR. A pair of W/B sub 4 C is aimed at getting high throughput. The energy resolution of these combinations was evaluated with Na--K absorption edge of NaCl approx 1.07 keV, which was a bit poor compared to a pair of beryl crystals.