Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: superconducting and structural properties

High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The...

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Veröffentlicht in:	Appl. Phys. Lett.; (United States) 1988-05, Vol.52 (20), p.1735-1737
Hauptverfasser:	LIOU, S. H, HONG, M, DAVIDSON, B. A, CHEN, H. S, NAKAHARA, S, BOONE, T, FELDER, R. J
Format:	Artikel
Sprache:	eng
Schlagworte:	360202 > Ceramics, Cermets, & Refractories-- Structure & Phase Studies 360204 > Ceramics, Cermets, & Refractories-- Physical Properties 656100 > Condensed Matter Physics-- Superconductivity ALKALINE EARTH METAL COMPOUNDS ANNEALING BARIUM COMPOUNDS BARIUM OXIDES CHALCOGENIDES COATINGS CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY Condensed matter: structure, mechanical and thermal properties COPPER COMPOUNDS COPPER OXIDES CRYSTAL STRUCTURE DATA ELECTRIC CONDUCTIVITY ELECTRICAL PROPERTIES ELECTRON TUBES ELECTRONIC EQUIPMENT ELEMENTS Exact sciences and technology EXPERIMENTAL DATA FABRICATION HEAT TREATMENTS HIGH TEMPERATURE INFORMATION LOW TEMPERATURE MAGNETRONS MATERIALS SCIENCE MICROWAVE EQUIPMENT MICROWAVE TUBES MORPHOLOGY NONMETALS NUMERICAL DATA OXIDES OXYGEN OXYGEN COMPOUNDS PHYSICAL PROPERTIES Physics SPUTTERING STRONTIUM COMPOUNDS STRONTIUM OXIDES SUPERCONDUCTING FILMS SUPERCONDUCTIVITY Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology TITANIUM COMPOUNDS TITANIUM OXIDES TRANSITION ELEMENT COMPOUNDS YTTRIUM COMPOUNDS 360201 > Ceramics, Cermets, & Refractories-- Preparation & Fabrication YTTRIUM OXIDES
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Zusammenfassung:	High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.99716