Charge State Formation Probabilities of Sputtered Gold Atoms

Charge State Formation Probabilities of Sputtered Gold Atoms

The yields and the energy spectra of sputtered Au positive and negative ions and atoms are measured. The velocity dependence of the ionization probabilities of sputtered particles is studied. The results obtained are interpreted taking into account the effect of the inter-atomic Coulomb interaction.

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Veröffentlicht in:Vacuum 1991-09, Vol.44 (9), p.903-905
Hauptverfasser: Popov, A B, Kablukov, S B, Makarenko, B N, Shergin, A P
Format: Artikel
Sprache:eng
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Zusammenfassung:The yields and the energy spectra of sputtered Au positive and negative ions and atoms are measured. The velocity dependence of the ionization probabilities of sputtered particles is studied. The results obtained are interpreted taking into account the effect of the inter-atomic Coulomb interaction.
ISSN:0042-207X