X-ray microfluorescence analyzer for multilayer metal films

An X-ray microfluorescence analyzer is described which combines the nondestructive analytical method of X-ray fluorescence with relatively small spatial discrimination (less than 50 μm) such that composition (chemistry), thickness and microstructural measurements can be made on a wide variety of het...

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Veröffentlicht in:	Thin solid films 1988-12, Vol.166 (1-2), p.263-272
Hauptverfasser:	Cross, Brian J., Wherry, David C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysing. Testing. Standards Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Measurement of properties and materials state Metals, semimetals and alloys Metals. Metallurgy Nondestructive testing Physics Specific materials Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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