A statistical model for integrated-circuit yield with clustered flaws

An explicit statistical model for die yield in integrated circuits (ICs) is developed. The model includes the effect of defect clustering, and is based on empirical observations of IC yield patterns. Using the simplest assumptions it leads to the well-known gamma-function yield formula.< >

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Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on electron devices 1988-04, Vol.35 (4), p.524-525
1. Verfasser:	Shier, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Costs Design. Technologies. Operation analysis. Testing Electronics Elementary particles Equations Exact sciences and technology Finite difference methods Integrated circuit modeling Integrated circuits Monte Carlo methods Semiconductor device modeling Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Statistical distributions Testing
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Beschreibung
Zusammenfassung:	An explicit statistical model for die yield in integrated circuits (ICs) is developed. The model includes the effect of defect clustering, and is based on empirical observations of IC yield patterns. Using the simplest assumptions it leads to the well-known gamma-function yield formula.< >
ISSN:	0018-9383 1557-9646
DOI:	10.1109/16.2490