Studies on the Stability of Copper Island Films Deposited on a Softenable Substrate

Investigations were carried out on the stability of discontinuous Cu films deposited on polymethylmethacrylate coated substrate heated to a temperature above the glass transition temperature of the polymer. It was reported that evaporated materials on such substrates form a subsurface particulate st...

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Veröffentlicht in:Journal of applied physics 1988-07, Vol.64 (1), p.437-440
Hauptverfasser: Pattabi, M, Sastry, M S M, Sivaramakrishnan, V
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Sastry, M S M
Sivaramakrishnan, V
description Investigations were carried out on the stability of discontinuous Cu films deposited on polymethylmethacrylate coated substrate heated to a temperature above the glass transition temperature of the polymer. It was reported that evaporated materials on such substrates form a subsurface particulate structure. It was found that in Cu films post-deposition instability persisted on a softenable substrate similar to the behavior of Cu on glass. On exposure to atmosphere, the resistance increased due to the interaction of atmospheric gases and water vapor. A film deposited at room temperature and heated also behaved in a similar fashion when exposed to atmosphere. 13 ref.--AA
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title Studies on the Stability of Copper Island Films Deposited on a Softenable Substrate
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