Studies on the Stability of Copper Island Films Deposited on a Softenable Substrate
Investigations were carried out on the stability of discontinuous Cu films deposited on polymethylmethacrylate coated substrate heated to a temperature above the glass transition temperature of the polymer. It was reported that evaporated materials on such substrates form a subsurface particulate st...
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Veröffentlicht in: | Journal of applied physics 1988-07, Vol.64 (1), p.437-440 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Investigations were carried out on the stability of discontinuous Cu films deposited on polymethylmethacrylate coated substrate heated to a temperature above the glass transition temperature of the polymer. It was reported that evaporated materials on such substrates form a subsurface particulate structure. It was found that in Cu films post-deposition instability persisted on a softenable substrate similar to the behavior of Cu on glass. On exposure to atmosphere, the resistance increased due to the interaction of atmospheric gases and water vapor. A film deposited at room temperature and heated also behaved in a similar fashion when exposed to atmosphere. 13 ref.--AA |
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ISSN: | 0021-8979 |