Simultaneous energy and angle resolved ion scattering spectroscopy

Simultaneous energy and angle resolved ion scattering spectroscopy

Low energy ion scattering (LEIS) is a useful technique for compositional and structural analysis of the outermost atomic layer of a solid. With our new EARISS-apparatus damage is strongly reduced. A 2-dimensional detector having a resolution of 1% in azimuth and radius is used. Up to 38 × 10 4 count...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1988-12, Vol.35 (3), p.541-543
Hauptverfasser: Ackermans, P.A.J., Van Der Meulen, P.F.H.M., Ottevanger, H., Van Straten, F.E., Brongersma, H.H.
Format: Artikel
Sprache:eng
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Beschreibung
Zusammenfassung:Low energy ion scattering (LEIS) is a useful technique for compositional and structural analysis of the outermost atomic layer of a solid. With our new EARISS-apparatus damage is strongly reduced. A 2-dimensional detector having a resolution of 1% in azimuth and radius is used. Up to 38 × 10 4 counts/s have been processed and stored.
ISSN:0168-583X
1872-9584
DOI:10.1016/0168-583X(88)90327-8