Simple and compact repetitively pulsed semiconductively preionised excimer lasers

The design parameters of semiconductively preionised excimer and atomic fluorine lasers employing optimised capacitor transfer excitation circuitry are described. The performance characteristics of these lasers, of minimum complexity, are given and are compared to the characteristics of previously described excimer and atomic fluorine lasers. These lasers are capable of producing ultraviolet pulses of up to 13 mJ and 1.1 MW at efficiencies of up to 1.1% and pulse repetition rates of 100 Hz.