Spectroscopic ellipsometry studies of excitonic features and optical functions of Al sub(x)Ga sub(1-x)As/GaAs multiple quantum well structures
Spectroscopic ellipsometry has been shown to provide a rapid, room-temperature, non-destructive assessment technique for quantum well structures ranging from a single well to 100-period structures. Good agreement for the first three transition energies was obtained for a series of well widths, using...
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Veröffentlicht in: | Journal of electronic materials 1990-01, Vol.19 (1), p.51-58 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Spectroscopic ellipsometry has been shown to provide a rapid, room-temperature, non-destructive assessment technique for quantum well structures ranging from a single well to 100-period structures. Good agreement for the first three transition energies was obtained for a series of well widths, using a 65% conduction band offset. Modelling the spectra by using individual layer bulk di-electric functions and by effective layer approximations has been compared. The optical functions of a single 50 angstrom well structure have been determined. |
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ISSN: | 0361-5235 |