Rapid electron beam reacted tantalum/titanium bilayers on silicon

The electrical and structural characteristics of tantalum-titanium bilayers on silicon reacted by electron beam heating have been investigated over a wide range of temperature and time conditions. The reacted layers exhibit low sheet resistance and stable electrical characteristics up to at least 11...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1988-12, Vol.27 (12), p.2333-2339
Hauptverfasser:	RAMAN, V. K, MAHMOOD, F, MCMAHON, R. A, AHMED, H, JEYNES, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysing. Testing. Standards Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Measurement of properties and materials state Metals, semimetals and alloys Metals. Metallurgy Nondestructive testing Physics Solid surfaces and solid-solid interfaces Specific materials Surface structure and topography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
Online-Zugang:	Volltext
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