Preparation of superconducting Y-Ba-Cu-O films by a reactive plasma evaporation method
Y-Ba-Cu-O superconducting films were prepared by a reactive plasma evaporation method, in which mixed powders were coevaporated in a thermal radio-frequency Ar+O2 plasma and the ternary composition controlled high-temperature metallic vapors were codeposited onto a substrate. The deposition rate was...
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Veröffentlicht in: | Appl. Phys. Lett.; (United States) 1988-04, Vol.52 (15), p.1274-1276 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Y-Ba-Cu-O superconducting films were prepared by a reactive plasma evaporation method, in which mixed powders were coevaporated in a thermal radio-frequency Ar+O2 plasma and the ternary composition controlled high-temperature metallic vapors were codeposited onto a substrate. The deposition rate was much more than 10 μm/min, which is several orders of magnitude higher than those reported by the other methods previously. The structure of the prepared films was identified as an orthorhombic oxygen-deficient perovskite phase and some films showed the preferred orientation of (001). The as-deposited film without post-annealing showed a superconducting transition temperature Tcm (midpoint) of 94 K. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.99679 |